US 12,463,129 B2
Conductive interconnects and methods of forming conductive interconnects
Raju Ahmed, Boise, ID (US); Frank Speetjens, Boise, ID (US); Darin S. Miller, Boise, ID (US); Siva Naga Sandeep Chalamalasetty, Boise, ID (US); Dave Pratt, Meridian, ID (US); Yi Hu, Boise, ID (US); Yung-Ta Sung, Boise, ID (US); Aaron K. Belsher, Boise, ID (US); and Allen R. Gibson, Boise, ID (US)
Assigned to Micron Technology, Inc., Boise, ID (US)
Filed by Micron Technology, Inc., Boise, ID (US)
Filed on Nov. 2, 2022, as Appl. No. 17/979,750.
Application 17/979,750 is a continuation of application No. 16/787,321, filed on Feb. 11, 2020, granted, now 11,545,391.
Prior Publication US 2023/0058288 A1, Feb. 23, 2023
Int. Cl. H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 23/522 (2006.01)
CPC H01L 23/5226 (2013.01) [H01L 21/76831 (2013.01); H01L 21/76843 (2013.01); H01L 21/76861 (2013.01); H01L 21/76865 (2013.01); H01L 21/76883 (2013.01); H01L 23/5283 (2013.01); H01L 21/76885 (2013.01); H01L 2221/1057 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A conductive interconnect, comprising:
a conductive liner lining a first opening in an insulative mass, the conductive liner establishing a second opening inside the first opening, wherein the conductive liner comprises a thickness below an upper portion of the first opening and as the conductive liner extends upward toward the upper portion of the first opening, the thickness of the conductive liner continually decreases to a smallest thickness at the upper portion of the first opening;
a conductive plug partially filling the second opening leaving a cavity above an upper surface of the conductive plug, portions of the conductive liner comprising a varied thickness extending elevationally above the upper surface of the conductive plug;
an insulative collar within the cavity against the portions of the conductive liner and against a first portion of the upper surface of the conductive plug leaving a second portion of the upper surface of the conductive plug not against the insulative collar; and
a plurality of vertically-extending interconnects over the insulative mass with at least one vertically-extending interconnect contacting the second portion of the upper surface portion of the conductive plug.