US 12,463,115 B2
Electrostatic discharge protection circuit
Andre Schmenn, Sachsenkam (DE); Klaus Diefenbeck, Munich (DE); and Joost Adriaan Willemen, Munich (DE)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Feb. 15, 2024, as Appl. No. 18/442,671.
Application 18/442,671 is a continuation of application No. 17/532,446, filed on Nov. 22, 2021, granted, now 11,929,305.
Claims priority of application No. 20209267 (EP), filed on Nov. 23, 2020.
Prior Publication US 2024/0186220 A1, Jun. 6, 2024
Int. Cl. H01L 23/482 (2006.01); H10D 84/03 (2025.01); H10D 89/60 (2025.01); H01L 21/56 (2006.01)
CPC H01L 23/4825 (2013.01) [H10D 84/038 (2025.01); H10D 89/921 (2025.01); H01L 21/56 (2013.01); H10D 89/611 (2025.01)] 11 Claims
OG exemplary drawing
 
1. An electrostatic discharge protection circuit, comprising:
a first electrostatic discharge protection device structure;
a first contact pad above the first electrostatic discharge protection device structure in a cross-sectional view; and
below the first electrostatic discharge protection device structure in the cross-sectional view, a metal connection coupling the first electrostatic discharge protection device structure to a second contact pad remote from the first contact pad,
wherein the metal connection in the cross-sectional view only partially overlaps the first electrostatic discharge protection device structure,
wherein the first electrostatic discharge protection device structure is laterally surrounded by a dielectric material,
wherein at least part of the second contact pad is uncovered by a hole in the dielectric material,
wherein the metal connection contacts the second contact pad through the hole in the dielectric material,
wherein the first contact pad and the second contact pad are each a metal pad.