US 12,463,083 B2
Wafer locking mechanism, wafer positioning device and wafer conveying apparatus
Lei Jiang, Beijing (CN)
Assigned to ZHONGKE JINGYUAN ELECTRON LIMITED, BEIJING (CN), Beijing (CN)
Appl. No. 18/009,773
Filed by ZHONGKE JINGYUAN ELECTRON LIMITED, BEIJING (CN), Beijing (CN)
PCT Filed May 28, 2021, PCT No. PCT/CN2021/096750
§ 371(c)(1), (2) Date Dec. 12, 2022,
PCT Pub. No. WO2022/142114, PCT Pub. Date Jul. 7, 2022.
Claims priority of application No. 202011621733.9 (CN), filed on Dec. 30, 2020.
Prior Publication US 2023/0223293 A1, Jul. 13, 2023
Int. Cl. H01L 21/687 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68728 (2013.01) [H01L 21/67754 (2013.01); H01L 21/681 (2013.01); H01L 21/6831 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A wafer locking mechanism configured to lock a wafer, the wafer locking mechanism comprising:
a wafer base, constructed in a form of a frustum shape tapering from a bottom portion thereof towards a top portion thereof, and configured to be elevatable along a direction of an axis thereof;
a plurality of rods, which are diametrically aligned in pairs perpendicular to the axis; and
a plurality of compression springs, which are respectively sheathed on respective distal ends of the plurality of rods distal to the wafer base, in one-to-one correspondence and extend radially outwards,
wherein the plurality of rods are respectively provided with both a plurality of ball-head portions which are located at respective proximal ends thereof proximate to the wafer base and abut against the wafer base, in one-to-one correspondence, and a plurality of jaws which protrude from the respective distal ends along a direction of the axis on a single side of the top portion and are pressed radially inwards by the plurality of compression springs, in one-to-one correspondence;
wherein one rod in each pair of rods in the plurality of rods is provided with an adjusting threaded member, which is located at a respective distal end of the one rod and is screwable to push radially against a respective one of the plurality of compression springs.