US 12,463,082 B2
Robot hand, robot and fixing device
Ippei Shimizu, Kobe (JP); and Yoshiki Maeda, Kobe (JP)
Assigned to KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe (JP)
Appl. No. 17/628,901
Filed by Kawasaki Jukogyo Kabushiki Kaisha, Kobe (JP)
PCT Filed Jul. 10, 2020, PCT No. PCT/JP2020/027145
§ 371(c)(1), (2) Date Jan. 21, 2022,
PCT Pub. No. WO2021/015023, PCT Pub. Date Jan. 28, 2021.
Claims priority of application No. 2019-135952 (JP), filed on Jul. 24, 2019.
Prior Publication US 2022/0254675 A1, Aug. 11, 2022
Int. Cl. H01L 21/687 (2006.01); B25J 15/00 (2006.01); F16B 5/02 (2006.01)
CPC H01L 21/68707 (2013.01) [B25J 15/0014 (2013.01); F16B 5/0233 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A robot hand configured to hold a substrate, comprising:
a base body;
a blade defining a holding position for holding the substrate and attached at a base part to the base body; and
a differential screw having a center axis perpendicular to a principal surface of the substrate existing at the holding position and configured to attach the base part of the blade to the base body,
the differential screw including:
a first threaded part having a first pitch;
a second threaded part having a second pitch different from the first pitch; and
an intervening member coaxially having a third threaded part to be threadedly engaged with the first threaded part, and a fourth threaded part to be threadedly engaged with the second threaded part,
wherein the first threaded part is provided to the base body, and the second threaded part is provided to the base part of the blade,
one of the base body and the blade is a first internally-threaded member having a first internally-threaded part comprising the first threaded part or the second threaded part,
a first slit is formed in the first internally-threaded member to intersect with the first internally-threaded part in a plane perpendicular to an axial direction of the first internally-threaded part, and
the intervening member is a deformable member deformable in a radial direction.