US 12,463,078 B2
Micro-element, alignment system and assembling method
Makoto Motoyoshi, Sendai (JP)
Assigned to TOHOKU-MICROTEC CO., LTD., Sendai (JP)
Filed by TOHOKU-MICROTEC CO., LTD., Sendai (JP)
Filed on Oct. 10, 2023, as Appl. No. 18/483,564.
Application 18/483,564 is a continuation of application No. PCT/JP2023/020603, filed on Jun. 2, 2023.
Prior Publication US 2024/0404864 A1, Dec. 5, 2024
Int. Cl. H01L 23/00 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/6835 (2013.01) [H01L 21/67144 (2013.01); H01L 24/63 (2013.01); H01L 24/65 (2013.01); H01L 24/73 (2013.01); H01L 24/80 (2013.01); H01L 24/95 (2013.01); H01L 2221/68309 (2013.01); H01L 2221/68313 (2013.01); H01L 2221/68354 (2013.01); H01L 2221/68368 (2013.01); H01L 2224/95144 (2013.01)] 4 Claims
OG exemplary drawing
 
1. An alignment system configured to arrange a plurality of micro-elements at scheduled positions on a mounting substrate, each of the micro-elements including a functional face, a bottom face parallel to the functional face, a plurality of circumscribing- ridges connecting the functional and bottom faces, and a magnetic-force receptor allocated at a limited site on the functional face, the micro-elements are equal in dimension and shape, the system comprising a rough alignment-apparatus including a picker having:
a plurality of capturing-probes, each of which having a capturing-face made of flat plane and a magnetic-force applying portion provided on the capturing-face; and
a base-plate on which the plurality of capturing-probes is arrayed with a predetermined array-pattern,
wherein each of the magnetic-force applying portions applies magnetic lines on the magnetic-force receptor to capture one of the micro-elements, respectively, and positions of a particular circumscribing-ridge elected among the plurality of circumscribing-ridges and the functional face are identified by the magnetic-force receptor.