US 12,463,075 B2
Cathode assembly for integration of embedded electrostatic chuck (ESC)
Karthik Elumalai, Singapore (SG); Arunkumar Tatti, Haveri (IN); Muhammad Danial Bin Mohamed Yunos, Singapore (SG); Eng Sheng Peh, Singapore (SG); Cheng Sun, Singapore (SG); and Ye Y Liu, Singapore (SG)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 23, 2024, as Appl. No. 18/586,307.
Prior Publication US 2025/0273497 A1, Aug. 28, 2025
Int. Cl. H01L 21/683 (2006.01); H01J 37/32 (2006.01)
CPC H01L 21/6833 (2013.01) [H01J 37/32577 (2013.01); H01J 37/32724 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
an electrostatic chuck (ESC) comprising:
a first body that is electrically conductive; and
a ceramic insert on the first body, wherein an electrode is embedded within the ceramic insert; and
a facility plate coupled to the ESC, wherein the facility plate comprises:
a second body that is electrically conductive;
a hole through the second body;
a DC input connector through the hole; and
an RF feed line coupled to the second body, wherein a pin of the DC input connector is electrically isolated from the RF feed line.