US 12,463,074 B2
Substrate transfer system and method with charging function
Seunggyu Kang, Hwaseong-si (KR); Jeonghun Lim, Suwon-si (KR); Youngwook Kim, Seoul (KR); Chuljun Park, Seoul (KR); Yongjun Ahn, Suwon-si (KR); Sangkyung Lee, Hwaseong-si (KR); and Hyunwoo Lee, Hwaseong-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Sep. 16, 2022, as Appl. No. 17/946,727.
Claims priority of application No. 10-2022-0015764 (KR), filed on Feb. 7, 2022.
Prior Publication US 2023/0253227 A1, Aug. 10, 2023
Int. Cl. H01L 21/677 (2006.01); H01L 21/67 (2006.01); H02J 50/12 (2016.01); H02J 50/90 (2016.01); H01M 10/48 (2006.01)
CPC H01L 21/67742 (2013.01) [H01L 21/67259 (2013.01); H01L 21/67294 (2013.01); H01L 21/6773 (2013.01); H01L 21/67736 (2013.01); H02J 50/12 (2016.02); H02J 50/90 (2016.02); H01M 10/486 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate transfer system comprising:
a mobile robot configured to handle a substrate carrier and comprising a power receiver;
a mobile robot interface device configured to handle the substrate carrier and comprising a power feeder configured to supply an electromotive force to the power receiver of the mobile robot;
at least one of: a first actuator configured to move the power feeder to adjust a distance between the power feeder and the power receiver and a second actuator configured to move the power receiver to adjust the distance between the power feeder and the power receiver;
an identification tag disposed on any one of the mobile robot and the mobile robot interface device;
a tag reader configured to recognize the identification tag; and
a controller configured to control an operation of the mobile robot and to control an operation of the first and/or second actuator,
wherein the controller is configured to control the first and/or second actuator to adjust the distance between the power feeder and the power receiver.