US 12,463,072 B2
Hash overhead hoist transport rail system and methods of operating the same
Guancyun Li, Miaoli County (TW); Ching-Jung Chang, Taichung (TW); Chi-Feng Tung, Miaoli County (TW); and Hsiang Yin Shen, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jan. 27, 2022, as Appl. No. 17/586,448.
Claims priority of provisional application 63/211,632, filed on Jun. 17, 2021.
Prior Publication US 2022/0406638 A1, Dec. 22, 2022
Int. Cl. B61J 1/06 (2006.01); B61B 3/00 (2006.01); B61L 23/00 (2006.01); B65G 9/00 (2006.01); B66C 19/00 (2006.01); E01B 25/26 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67715 (2013.01) [B61B 3/00 (2013.01); B61J 1/06 (2013.01); B61L 23/002 (2013.01); B65G 9/008 (2013.01); B66C 19/00 (2013.01); E01B 25/26 (2013.01); H01L 21/67259 (2013.01); H01L 21/67724 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01); E01B 2202/024 (2013.01); H01L 21/67727 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An automated material handling system (AMHS) for a semiconductor fabrication facility (FAB), comprising:
a network of rails;
a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails;
a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table; and
a hash rail connected to and overlapping the turn table, wherein the hash rail is configured to rotate about the axis with the turn table, wherein the hash rail includes a first portion and a second portion each having a pi shape (π).