US 12,463,071 B2
Deposition apparatus, electronic device manufacturing apparatus, and deposition method
Takuhei Mimura, Kawasaki (JP)
Assigned to CANON TOKKI CORPORATION, Mitsuke (JP)
Filed by Canon Tokki Corporation, Mitsuke (JP)
Filed on Dec. 12, 2019, as Appl. No. 16/711,572.
Claims priority of application No. 2018-234923 (JP), filed on Dec. 14, 2018.
Prior Publication US 2020/0189054 A1, Jun. 18, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/677 (2006.01); C23C 14/04 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); C23C 16/04 (2006.01); C23C 16/52 (2006.01); C23C 16/54 (2006.01); H01L 21/67 (2006.01); B23Q 3/152 (2006.01); B23Q 3/18 (2006.01); H10K 71/00 (2023.01)
CPC H01L 21/67709 (2013.01) [C23C 14/042 (2013.01); C23C 14/54 (2013.01); C23C 14/568 (2013.01); C23C 16/042 (2013.01); C23C 16/52 (2013.01); C23C 16/54 (2013.01); H01L 21/67173 (2013.01); B23Q 3/152 (2013.01); B23Q 3/186 (2013.01); H10K 71/00 (2023.02)] 15 Claims
OG exemplary drawing
 
1. A deposition apparatus comprising:
a transport mechanism including a transport carrier which holds and transports a substrate, and a plurality of transport modules which constitute a transport path through which the transport carrier moves, the plurality of transport modules being respectively disposed in a plurality of chambers;
an alignment chamber, of the plurality of chambers, in which the substrate held by the transport carrier is loaded and a mask is positioned and fixed to the loaded substrate;
a deposition chamber, of the plurality of chambers, in which the substrate held by the transport carrier is loaded from the alignment chamber and deposition materials are deposited on the loaded substrate; and
a control block configured to control a magnetic force generated between a plurality of magnets arranged in the transport carrier in a transport direction of the substrate and a plurality of coils respectively arranged to face the plurality of magnets in each of the plurality of transport modules by applying a current or a voltage to the plurality of coils,
wherein the control block is configured to switch a transport mode of the transport mechanism between:
(i) a first mode in which the transport carrier transports the substrate by moving in the transporting direction with a driving force in the transporting direction which is generated by a magnetic force between the plurality of magnets arranged in the transport carrier and a first plurality of coils of the plurality of coils in a first transport module of the plurality of transport modules, wherein the transport carrier is in a state in which guide grooves of the transport carrier are not in contact with rollers of the first transport module, and
(ii) a second mode in which the transport carrier transports the substrate by moving in the transporting direction with a driving force in the transporting direction which is generated by a magnetic force between the plurality of magnets arranged in the transport carrier and a second plurality of coils of the plurality of coils in a second transport module of the plurality of transport modules, wherein the transport carrier is in a state in which the transport carrier is supported by rollers of the second transport module which are in contact with the guide grooves of the transport carrier, and
the control block is configured to control, in the alignment chamber, a magnetic force between the plurality of magnets arranged in the transport carrier and a third plurality of coils of the plurality of coils in a third transport module of the plurality of transport modules disposed in the alignment chamber so that position of the transport carrier which holds the substrate is adjusted.