US 12,463,068 B2
Sheet release apparatus
Hitoshi Aoki, Hachioji (JP); Kiyotaka Kizaki, Hachioji (JP); Yuki Morita, Hachioji (JP); and Ryosuke Sumiya, Hachioji (JP)
Assigned to TOKYO SEIMITSU CO. , LTD., Tokyo (JP)
Appl. No. 18/694,754
Filed by TOKYO SEIMITSU CO., LTD., Hachioji (JP)
PCT Filed May 24, 2022, PCT No. PCT/JP2022/021178
§ 371(c)(1), (2) Date Mar. 22, 2024,
PCT Pub. No. WO2023/053570, PCT Pub. Date Apr. 6, 2023.
Claims priority of application No. 2021-158329 (JP), filed on Sep. 28, 2021.
Prior Publication US 2024/0404847 A1, Dec. 5, 2024
Int. Cl. H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/67132 (2013.01) [H01L 21/6836 (2013.01); H01L 2221/68381 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A sheet release apparatus that releases a protective sheet affixed to an adherend upon application of a release force to the protective sheet via a release tape, the sheet release apparatus comprising:
conveyance means that is movable in a predetermined movement direction with the adherend held therein; and
bonding means for bonding the release tape to the protective sheet,
wherein the bonding means comprises a plurality of stamp heads that each contact the release tape to press the release tape toward the protective sheet,
a contact surface which contacts the release tape of each of the stamp heads is formed in a substantially circular shape.