US 12,463,024 B2
Device for generating a dielectric barrier discharge and method for treating an object to be activated
Dariusz Korzec, Falkenstein (DE); Stefan Nettesheim, Regensburg (DE); and Florian Freund, Bad Abbach (DE)
Assigned to TDK ELECTRONICS AG, Munich (DE)
Appl. No. 17/758,546
Filed by TDK Electronics AG, Munich (DE)
PCT Filed Dec. 17, 2020, PCT No. PCT/EP2020/086796
§ 371(c)(1), (2) Date Jul. 8, 2022,
PCT Pub. No. WO2021/144111, PCT Pub. Date Jul. 22, 2021.
Claims priority of application No. 102020100828.7 (DE), filed on Jan. 15, 2020.
Prior Publication US 2023/0046192 A1, Feb. 16, 2023
Int. Cl. H01J 37/32 (2006.01); H10N 30/40 (2023.01)
CPC H01J 37/32825 (2013.01) [H01J 37/32348 (2013.01); H01J 37/32458 (2013.01); H01J 37/32743 (2013.01); H01J 37/32807 (2013.01); H01J 2237/162 (2013.01); H01J 2237/336 (2013.01); H10N 30/40 (2023.02)] 24 Claims
OG exemplary drawing
 
1. A device for generating a dielectric barrier discharge for a treatment of an object to be activated with non-thermal atmospheric pressure plasma, comprising:
a dielectric working chamber having a wall made of a dielectric material and enclosing a working space, the wall having an outer side facing away from the working space, the outer side having metallization that is a metal layer applied to the wall in a material-bonding manner, the working space being an open volume; and
a high-voltage source which is configured to apply a high voltage to the metallization or to the object to be activated when the object to be activated is arranged in the working space.