| CPC H01J 37/32348 (2013.01) [H01J 37/3244 (2013.01); H01J 37/32532 (2013.01)] | 6 Claims |
|
1. An active gas generator that supplies a material gas to a discharge space where a dielectric barrier discharge occurs, to activate the material gas and generate active gas, the active gas generator comprising:
a first electrode dielectric film;
a second electrode dielectric film formed below the first electrode dielectric film;
a first feeder disposed on an upper surface of the first electrode dielectric film, the first feeder having conductivity; and
a second feeder disposed on a lower surface of the second electrode dielectric film,
wherein an AC voltage is applied to the first feeder, the second feeder is set to ground potential, and a dielectric space in which the first electrode dielectric film faces the second electrode dielectric film includes the discharge space,
the second electrode dielectric film includes a gas outlet for ejecting the active gas downward,
the active gas generator further comprises
a housing having conductivity and accommodating the first and second electrode dielectric films and the first and second feeders, the housing including a feeding space above the first feeder,
the housing including:
a material gas inlet receiving the material gas from outside;
a gas relay region for supplying the material gas to the discharge space; and
a housing gas outlet for ejecting the active gas from the gas outlet downward,
a space from the material gas inlet to the housing gas outlet through the gas relay region and the discharge space is defined as an active gas generating space,
the housing and the first electrode dielectric film form a gas separation structure for separating a gas stream into the active gas generating space and the feeding space, and
the active gas generator further comprises
a vacuum pump disposed outside the housing and setting the feeding space under vacuum.
|