US 12,463,008 B2
Charged particle beam scanning module, charged particle beam device, and computer
Wen Li, Tokyo (JP); Shinichi Murakami, Tokyo (JP); Hiroyuki Takahashi, Tokyo (JP); Makoto Suzuki, Tokyo (JP); and Wataru Mori, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Jul. 25, 2022, as Appl. No. 17/872,046.
Claims priority of application No. 2021-126744 (JP), filed on Aug. 2, 2021.
Prior Publication US 2023/0036590 A1, Feb. 2, 2023
Int. Cl. H01J 37/26 (2006.01); H01J 37/147 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/265 (2013.01) [H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/2817 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A charged particle beam scanning module comprising:
a scanning controller configured to output a scanning digital signal of a charged particle beam;
a DAC circuit configured to convert the scanning digital signal into a scanning analog signal and output the scanning analog signal; and
an ADC circuit configured to convert the scanning analog signal into an evaluation digital signal,
wherein a sampling frequency at which the DAC circuit samples the scanning digital signal is a first frequency,
wherein a sampling frequency at which the ADC circuit samples the scanning analog signal is a second frequency smaller than the first frequency, and
wherein the scanning controller determines an output characteristic of the DAC circuit based on the scanning digital signal and the evaluation digital signal, the output characteristic indicating a relationship between the scanning digital signal and the evaluation digital signal.