US 12,463,007 B2
Electron microscope analysis system
Daisuke Shindo, Wako (JP); and Takeshi Tomita, Wako (JP)
Assigned to RIKEN, Saitama (JP)
Appl. No. 18/010,088
Filed by RIKEN, Wako (JP)
PCT Filed May 27, 2021, PCT No. PCT/JP2021/020294
§ 371(c)(1), (2) Date Dec. 13, 2022,
PCT Pub. No. WO2021/256212, PCT Pub. Date Dec. 23, 2021.
Claims priority of application No. 2020-105201 (JP), filed on Jun. 18, 2020.
Prior Publication US 2023/0223232 A1, Jul. 13, 2023
Int. Cl. H01J 37/26 (2006.01); G01N 23/20058 (2018.01)
CPC H01J 37/263 (2013.01) [G01N 23/20058 (2013.01)] 5 Claims
OG exemplary drawing
 
1. An electron microscope analysis system, comprising:
a detector that captures an electron microscope image formed on a detection plane by applying an electron beam onto a specimen and transmitting the electron beam through the specimen,
wherein the electron beam that forms the electron microscope image is analyzed by using an electron model having a linear matter wave (de Broglie wave) that spins about a predetermined point on the irradiation beam.