US 12,463,005 B2
Correction coefficient calculation device, correction coefficient calculation method, and correction coefficient calculation program
Miki Aoyagi, Tokyo (JP); Masumi Shirai, Tokyo (JP); and Kei Sakai, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/013,605
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Jul. 16, 2020, PCT No. PCT/JP2020/027670
§ 371(c)(1), (2) Date Dec. 29, 2022,
PCT Pub. No. WO2022/014008, PCT Pub. Date Jan. 20, 2022.
Prior Publication US 2023/0343547 A1, Oct. 26, 2023
Int. Cl. H01J 37/22 (2006.01)
CPC H01J 37/222 (2013.01) 13 Claims
OG exemplary drawing
 
13. A correction coefficient calculation method of calculating a machine difference correction coefficient for correcting a machine difference between image acquisition devices that acquire an image of a sample, the method comprising:
a step of calculating a machine difference correction coefficient for correcting a difference between first image data of the sample acquired by a first image acquisition device and second image data of the sample acquired by a second image acquisition device, wherein
in the step of calculating the machine difference correction coefficient, a first feature amount of image data of a reference sample that is acquired by the first image acquisition device is acquired,
in the step of calculating the machine difference correction coefficient, a second feature amount of the image data of the reference sample that is acquired by the second image acquisition device is acquired,
in the step of calculating the machine difference correction coefficient, a third feature amount of image data of a calibration member that is acquired by the first image acquisition device is acquired,
in the step of calculating the machine difference correction coefficient, the machine difference correction coefficient is calculated by calculating a correction value derived from a difference between the first feature amount and the second feature amount, and
in the step of calculating the machine difference correction coefficient, when a machine difference variation coefficient representing a change over time in the third feature amount is outside a range of a machine difference variation coefficient threshold, a current value of the third feature amount is newly acquired and the machine difference correction coefficient is recalculated using the newly acquired third feature amount.