US 12,463,004 B2
Charged particle microscope and stage
Kazuki Ishizawa, Tokyo (JP); Kenichi Nishinaka, Tokyo (JP); and Michiko Suzuki, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/265,733
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Dec. 24, 2020, PCT No. PCT/JP2020/048445
§ 371(c)(1), (2) Date Jun. 7, 2023,
PCT Pub. No. WO2022/137427, PCT Pub. Date Jun. 30, 2022.
Prior Publication US 2024/0120169 A1, Apr. 11, 2024
Int. Cl. H01J 37/20 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/20 (2013.01) [H01J 37/265 (2013.01); H01J 2237/20285 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A charged particle microscope comprising:
a barrel;
an electron gun provided inside the barrel and capable of emitting an electron beam; and
a stage provided below the electron gun inside the barrel, fixed to the barrel, and configured to install a sample holder with a sample held, wherein
the stage includes
a first stage member of which a planar shape is annular,
a second stage member disposed to be concentric to the first stage member,
a first actuator connected to the first stage member, and
a second actuator connected to the second stage member, wherein
a first movable range in which the first actuator is able to move the first stage member is broader than a second movable range in which the second actuator is able to move the second stage member.