US 12,462,968 B2
Systems and methods for uniform cooling of electromagnetic coil
Oscar Florendo, Hollister, CA (US); and Vincent Nguyen, San Jose, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Jan. 4, 2022, as Appl. No. 17/568,215.
Claims priority of provisional application 63/273,155, filed on Oct. 29, 2021.
Prior Publication US 2023/0133576 A1, May 4, 2023
Int. Cl. H01F 27/00 (2006.01); H01F 27/10 (2006.01); H01F 27/28 (2006.01)
CPC H01F 27/2876 (2013.01) [H01F 27/105 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A system comprising:
an electromagnetic coil;
a cooling structure surrounding the entirety of the perimeter of the electromagnetic coil, wherein the cooling structure comprises a first cooling channel and a second cooling channel arranged alternately about the electromagnetic coil, and wherein the first cooling channel and the second cooling channel are defined by separate tubing circuits wrapped around the entirety of the perimeter of the electromagnetic coil; and
a cooling fluid source configured to deliver a first cooling fluid to the first cooling channel and a second cooling fluid to the second cooling channel, such that the first cooling fluid and the second cooling fluid cool the electromagnetic coil.