US 12,462,369 B2
Method for image-based sensor trace analysis
Varoujan Chakarian, Northridge, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 16, 2023, as Appl. No. 18/234,713.
Prior Publication US 2025/0061557 A1, Feb. 20, 2025
Int. Cl. G06T 7/00 (2017.01); G06V 10/147 (2022.01)
CPC G06T 7/0004 (2013.01) [G06V 10/147 (2022.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
grouping a plurality of signal traces based on at least one of a plurality of signal trace characteristics, the plurality of signal traces associated with one or more components of manufacturing equipment;
generating an image comprising groups of visual indicators associated with signal traces with similar signal trace characteristics, wherein a first dimension of the image corresponds to at least one of the plurality of signal traces, and a second dimension of the image corresponds to a plurality of time values, wherein a first visual indicator in the groups of visual indicators corresponds to a signal trace characteristic of a first signal trace of the plurality of signal traces at a first time value of the plurality of time values, and wherein the first signal trace corresponds to a first row or column with respect to the first dimension in the image, and the first time value corresponds to a first position with respect to the second dimension of the image;
detecting a defect in operation of at least one of the one or more components of the manufacturing equipment based on a deviation of one of the visual indicators in at least one portion of at least one row or column of the image from a visual indicator of a respective group; and
classifying the defect based on a signal trace corresponding to the at least one row or column of the image.