US 12,461,453 B2
EUV reticle stocker and method of operating the same
Lutz Rebstock, Gaienhofen (DE)
Assigned to BROOKS AUTOMATION (GERMANY) GMBH, (DE)
Appl. No. 18/252,902
Filed by BROOKS AUTOMATION (GERMANY) GMBH, SteiBlingen (DE)
PCT Filed May 10, 2021, PCT No. PCT/EP2021/062342
§ 371(c)(1), (2) Date May 15, 2023,
PCT Pub. No. WO2022/106071, PCT Pub. Date May 27, 2022.
Claims priority of application No. 20208499 (EP), filed on Nov. 18, 2020.
Prior Publication US 2023/0418169 A1, Dec. 28, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 1/66 (2012.01); G03F 7/00 (2006.01)
CPC G03F 7/70741 (2013.01) [G03F 1/66 (2013.01); G03F 7/70933 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A clamping device for an EUV inner pod (EIP), the EIP comprising two or more components for containing an EUV reticle, wherein the clamping device comprises a single one-piece clamping element configured to:
provide the functions of immobilizing the two or more components of the EIP relative to one another and immobilizing the reticle therein; and
only partially cover the EIP.