US 12,461,452 B2
Electrostatic clamp
Gustaaf Galein Van Eden, Utrecht (NL); Cung Vuong Nguyen, Roermond (NL); and Ksenia Sergeevna Makarenko, Veldhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 18/252,294
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Oct. 14, 2021, PCT No. PCT/EP2021/078514
§ 371(c)(1), (2) Date May 9, 2023,
PCT Pub. No. WO2022/106125, PCT Pub. Date May 27, 2022.
Claims priority of application No. 20208312 (EP), filed on Nov. 18, 2020.
Prior Publication US 2024/0012341 A1, Jan. 11, 2024
Int. Cl. G03F 7/00 (2006.01); H01L 21/683 (2006.01)
CPC G03F 7/70708 (2013.01) [H01L 21/6833 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An electrostatic clamp comprising:
a dielectric member comprising one or more trenches formed in a surface of the dielectric member, the one or more trenches each having a bottom surface and at least one side surface extending from the bottom surface to the surface of the dielectric member;
a plurality of conductive burls extending from the bottom surface and configured to define a plane in which an object is held; and
a conductive element extending between and connecting the plurality of conductive burls,
wherein the conductive element is disposed within the one or more trenches.