US 12,461,444 B2
Sulfonium salt, photoacid generator, curable composition, and resist composition
Takuto Nakao, Kyoto (JP); and Yuji Nakamura, Kyoto (JP)
Assigned to SAN-APRO LTD., Kyoto (JP)
Appl. No. 17/789,571
Filed by SAN-APRO LTD., Kyoto (JP)
PCT Filed Jan. 4, 2021, PCT No. PCT/JP2021/000009
§ 371(c)(1), (2) Date Jun. 28, 2022,
PCT Pub. No. WO2021/186846, PCT Pub. Date Sep. 23, 2021.
Claims priority of application No. 2020-046335 (JP), filed on Mar. 17, 2020.
Prior Publication US 2023/0100642 A1, Mar. 30, 2023
Int. Cl. G03F 7/004 (2006.01); C07C 309/06 (2006.01); C07C 381/12 (2006.01); C07F 7/18 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01)
CPC G03F 7/0045 (2013.01) [C07C 309/06 (2013.01); C07C 381/12 (2013.01); C07F 7/1804 (2013.01); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01)] 15 Claims
 
1. A sulfonium salt represented by general formula (1) described below,

OG Complex Work Unit Chemistry
[in formula (1), R1 and R2 each independently represent an aryl group having 6 to 14 carbon atoms, and some of hydrogen atoms in the aryl group may be substituted with a substituent (t); the substituent (t) represents an alkyl group having 1 to 8 carbon atoms or an aryl group having 6 to 10 carbon atoms, the substituent (t) may be bonded together directly via a single bond, or through a group represented by —SO—, —SO2—, or —CO, with R1 and R2; A1 and A2 each independently represent a hydrogen atom, a branched alkyl group having 3 to 7 carbon atoms, a branched alkoxy group having 3 to 7 carbon atoms, a tertiary silyl group having 3 to 9 carbon atoms, or a tertiary siloxy group having 3 to 9 carbon atoms, provided that both of A1 and A2 do not represent a hydrogen atom; T1 and T2 each independently represent an alkyl group having 1 to 7 carbon atoms, an alkoxy group having 1 to 7 carbon atoms, a silyl group having 3 to 9 carbon atoms, or a siloxy group having 3 to 9 carbon atoms; m1 and m2 each represent the number of occurrences of each of T1 and T2, m1 represents an integer of 0 to 3, m2 represents an integer of 0 to 4; L represents —O—, —S—, —SO—, —SO2—, or —CO; S represents sulfur atom, O represents oxygen atom, C represents carbon atom; and X− represents a monovalent polyatomic anion].