US 12,461,400 B2
Electro-optic modulator and method of forming the same
Shiyang Zhu, Singapore (SG); and Qize Zhong, Singapore (SG)
Assigned to AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH, Singapore (SG)
Appl. No. 18/041,913
Filed by AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH, Singapore (SG)
PCT Filed Jun. 25, 2021, PCT No. PCT/SG2021/050372
§ 371(c)(1), (2) Date Feb. 16, 2023,
PCT Pub. No. WO2022/039670, PCT Pub. Date Feb. 24, 2022.
Claims priority of application No. 10202008062V (SG), filed on Aug. 21, 2020.
Prior Publication US 2023/0333418 A1, Oct. 19, 2023
Int. Cl. G02F 1/035 (2006.01); G02F 1/21 (2006.01)
CPC G02F 1/035 (2013.01) [G02F 1/212 (2021.01)] 13 Claims
OG exemplary drawing
 
1. An electro-optic modulator comprising:
a waveguide, the waveguide comprising aluminum nitride, configured to carry optical light along a longitudinal length of the waveguide;
a first electrically conductive sub-wavelength grating on a first side of the waveguide, the first electrically conductive sub-wavelength grating comprising a plurality of fingers, the plurality of fingers comprising doped polysilicon having a refractive index larger than a refractive index of the aluminum nitride of the waveguide, extending substantially perpendicular to the longitudinal length of the waveguide; and
a second electrically conductive sub-wavelength grating on a second side of the waveguide opposite the first side, the second electrically conductive sub-wavelength grating comprising a plurality of fingers, the plurality of fingers comprising doped polysilicon having the refractive index larger than the refractive index of the aluminum nitride of the waveguide, extending substantially perpendicular to the longitudinal length of the waveguide;
wherein the electro-optic modulator comprises a first silicon oxide layer comprising silicon oxide between the plurality of fingers of the first electrically conductive sub-wavelength grating such that an effective refractive index of the first electrically conductive sub-wavelength grating is less than the refractive index of the aluminium nitride of the waveguide;
wherein the electro-optic modulator comprises a second silicon oxide layer comprising silicon oxide between the plurality of fingers of the second electrically conductive sub-wavelength grating such that an effective refractive index of the second electrically conductive sub-wavelength grating is less than the refractive index of the aluminium nitride of the waveguide; and
wherein the electro-optic modulator is configured to modulate the optical light upon application of a potential difference between the first electrically conductive sub-wavelength grating and the second electrically conductive sub-wavelength grating based on Pockels effect.