US 12,461,380 B2
Antireflection coatings for metasurfaces
Dianmin Lin, Los Altos, CA (US); Michael Anthony Klug, Austin, TX (US); Pierre St. Hilaire, Belmont, CA (US); Mauro Melli, San Leandro, CA (US); Christophe Peroz, Tokyo (JP); and Evgeni Poliakov, Oakland, CA (US)
Assigned to Magic Leap, Inc., Plantation, FL (US)
Filed by Magic Leap, Inc., Plantation, FL (US)
Filed on May 2, 2023, as Appl. No. 18/311,097.
Application 18/311,097 is a division of application No. 15/879,005, filed on Jan. 24, 2018, granted, now 11,681,153.
Claims priority of provisional application 62/451,587, filed on Jan. 27, 2017.
Prior Publication US 2023/0273450 A1, Aug. 31, 2023
Int. Cl. G02B 27/42 (2006.01); G02B 1/00 (2006.01); G02B 1/11 (2015.01); G02B 1/111 (2015.01); G02B 5/18 (2006.01); G02B 27/00 (2006.01); G02B 27/01 (2006.01)
CPC G02B 27/4205 (2013.01) [G02B 1/002 (2013.01); G02B 1/111 (2013.01); G02B 5/1847 (2013.01); G02B 27/0093 (2013.01); G02B 27/0172 (2013.01); G02B 27/4272 (2013.01); G02B 2027/014 (2013.01); G02B 2027/0174 (2013.01); G02B 2027/0178 (2013.01); G02B 2027/0185 (2013.01); G02B 2207/101 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An optical system comprising:
an optical element comprising a metasurface that includes a plurality of nanostructures forming repeating unit cells, wherein, as seen in a top-down view, each unit cell comprises:
a plurality of spaced-apart first nanostructures, each of the first nanostructures comprising:
a first length; and
a first width,
wherein the first length is longer than the first width,
wherein the first length extends in a first direction and the first width extends in a second direction,
wherein the second direction crosses the first direction,
wherein the first widths of different ones of the plurality of spaced-apart first nanostructures differ from one another, wherein the first nanostructures are separated from each other by a gap along the first lengths of the first nanostructures; and
a plurality of spaced-apart second nanostructures disposed at a side of the plurality of spaced-apart first nanostructures, each of the second nanostructures comprising: having
a second length extending in the second direction; and
a second width extending in the first direction,
wherein the second widths of different ones of the plurality of spaced-apart second nanostructures differ from one another, and
wherein the second nanostructures are separated from each other by a gap along the second lengths of the second nanostructures,
wherein the second direction crosses the first direction; and
an antireflection coating for the optical element comprising the metasurface, the antireflection coating comprising:
a layer of an optically transparent material having a refractive index greater than 1 and less than a refractive index of a material comprising the metasurface,
wherein the layer of the optically transparent material is conformally disposed over the nanostructures of the metasurface to follow contours of the nanostructures without completely filling volumes separating each of the nanostructures such that a top surface of the optical element is non-planar, and wherein the unfilled volumes that separate the first nanostructures from the second nanostructures are of a different volume from the unfilled volumes that separate the first nanostructures or that separate the second nanostructures.