| CPC G02B 6/1228 (2013.01) [G02B 2006/12097 (2013.01); G02B 2006/12142 (2013.01)] | 10 Claims |

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1. An optical waveguide element comprising:
an optical waveguide substrate having a rib-type optical waveguide made of a material having an electro-optic effect; and
spot size conversion means for changing a mode field diameter of a light wave propagating through the optical waveguide at a position where an input end or an output end of the rib-type optical waveguide is formed,
wherein the spot size conversion means includes
a first configuration layer that is connected to the rib-type optical waveguide and includes a tapered portion in which a width of the optical waveguide expands,
a second configuration layer that is laminated on the first configuration layer and has a width narrower than a width of the first configuration layer, and
a third configuration layer that is disposed to cover the second configuration layer excluding a part of the second configuration layer close to the rib-type optical waveguide and has a width wider than the width of the second configuration layer.
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