| CPC G01V 1/50 (2013.01) [G01V 1/18 (2013.01); G01V 1/46 (2013.01); G01V 1/523 (2013.01); G01V 2210/624 (2013.01)] | 18 Claims |

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1. A system comprising:
a sensor housing comprising an upper sensor housing and a lower sensor housing, wherein a channel is disposed between the upper sensor housing and the lower sensor housing;
a cantilever beam connected to a stem extending from the lower sensor housing and disposed within the channel;
an actuator located in an equipment cavity in the lower sensor housing, the actuator connected to the cantilever beam through the lower sensor housing and configured to cause the cantilever beam to vibrate;
a sensor connected to the cantilever beam and configured to generate a first signal representing a cantilever beam vibration of the cantilever beam;
a membrane formed from the lower sensor housing and disposed at the stem between the actuator and the cantilever beam such that the membrane and the lower sensor housing form a cavity within the lower sensor housing between the actuator and the stem, the cavity being disposed between the actuator and the cantilever beam, wherein the cavity has a toroidal shape in the lower sensor housing at the stem to reduce a mass of the lower sensor housing at the stem and decrease a vibration dampening effect of the mass of the lower sensor housing, and wherein the membrane transfers vibrations between the actuator and the cantilever beam through the stem;
an accelerometer secured to the lower sensor housing, the accelerometer configured to generate a second signal representing an external vibration of the lower sensor housing, wherein the external vibration changes the cantilever beam vibration; and
a signal processor configured to receive, as input, the first signal and the second signal and to generate, as output, a filtered signal that reduces an effect of the external vibration on the cantilever beam vibration.
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