US 12,461,212 B2
Substrate processing system and method of estimating height of annular member
Toshiaki Kodama, Nirasaki (JP); Shinji Wakabayashi, Nirasaki (JP); Takehiro Shindo, Nirasaki (JP); and Tatsuru Okamura, Miyagi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Apr. 29, 2022, as Appl. No. 17/661,302.
Claims priority of application No. 2021-080547 (JP), filed on May 11, 2021.
Prior Publication US 2022/0365187 A1, Nov. 17, 2022
Int. Cl. G01S 7/497 (2006.01); G01S 17/08 (2006.01); G01S 17/88 (2006.01); H01J 37/32 (2006.01)
CPC G01S 7/497 (2013.01) [G01S 17/08 (2013.01); G01S 17/88 (2013.01); H01J 37/32642 (2013.01); H01J 2237/24578 (2013.01); H01J 2237/24592 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A substrate processing system comprising:
a substrate processing apparatus including a stage on which a substrate and an annular member disposed to surround the substrate are placed, and configured to perform a predetermined process on the substrate placed on the stage;
a substrate transport mechanism including a substrate holder and configured to hold the substrate by the substrate holder and load and unload the substrate with respect to the substrate processing apparatus;
a distance sensor provided in the substrate holder and configured to measure distances from the substrate holder; and
a control device,
wherein the substrate transport mechanism is further configured to place, on the stage on which the annular member is placed, a jig substrate having a reference surface as a reference for a height of the annular member,
wherein the distance sensor is further configured to measure a distance from the substrate holder positioned above the stage to the reference surface of the jig substrate and a distance from the substrate holder to the annular member, and
wherein the control device is configured to estimate the height of the annular member based on a measurement result of the distance to the reference surface and a measurement result of the distance to the annular member.