US 12,461,126 B2
Probe device
Naoki Samura, Tokyo (JP); and Yasuhiko Nara, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/566,151
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Jun. 29, 2021, PCT No. PCT/JP2021/024581
§ 371(c)(1), (2) Date Dec. 1, 2023,
PCT Pub. No. WO2023/276002, PCT Pub. Date Jan. 5, 2023.
Prior Publication US 2024/0288472 A1, Aug. 29, 2024
Int. Cl. G01R 1/067 (2006.01); G01R 1/04 (2006.01); G06T 7/73 (2017.01)
CPC G01R 1/06794 (2013.01) [G01R 1/0408 (2013.01); G06T 7/74 (2017.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30204 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A probe device comprising:
a sample stage that supports a sample;
a probe unit to which a probe brought into contact with a predetermined sample surface of the sample is attached;
a first camera that images the sample and the probe; and
a first camera optical axis adjustment stage that adjusts an optical axis of the first camera, wherein
the optical axis of the first camera is parallel to the sample surface, and
the first camera optical axis adjustment stage allows the optical axis of the first camera to be moved in a direction perpendicular to the sample surface.