US 12,461,080 B2
Sensor and sensor system
Yosuke Akimoto, Yokohama Kanagawa (JP); Akira Fujimoto, Kawasaki Kanagawa (JP); and Hiroaki Yamazaki, Yokohama Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Kawasaki (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 27, 2023, as Appl. No. 18/174,960.
Claims priority of application No. 2022-110263 (JP), filed on Jul. 8, 2022.
Prior Publication US 2024/0011961 A1, Jan. 11, 2024
Int. Cl. G01N 33/00 (2006.01)
CPC G01N 33/0027 (2013.01) [G01N 33/0011 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a housing including a first housing member, the first housing member including an opening, the first housing member including a first inner face and a first side face inside the opening;
a sensor portion including a sensor member and a sensor element, the sensor member including a hole, a first gap being provided between the sensor element and the sensor member; and
a film member being porous, the film member including an inner region and an outer region being around the inner region, the outer region facing the first inner face, the sensor member being located between the sensor element and the inner region, the sensor member facing the inner region, at least a part of the inner region overlapping the first side face in a second direction crossing a first direction from the sensor element to the sensor member, such that a line drawn in the second direction intersects both the first side face and the overlapping part of the inner region.