US 12,461,073 B2
Detection system, control method, and detection device
Hiromasa Takahashi, Minato (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 1, 2023, as Appl. No. 18/162,814.
Application 18/162,814 is a continuation of application No. PCT/JP2021/028123, filed on Jul. 29, 2021.
Claims priority of application No. 2020-135082 (JP), filed on Aug. 7, 2020.
Prior Publication US 2023/0168229 A1, Jun. 1, 2023
Int. Cl. G01N 29/265 (2006.01); B23K 31/12 (2006.01); B25J 9/00 (2006.01); G01N 29/04 (2006.01); G01N 29/11 (2006.01); G01N 29/28 (2006.01); G01N 29/44 (2006.01); G01N 33/207 (2019.01)
CPC G01N 29/265 (2013.01) [B23K 31/125 (2013.01); B25J 9/0096 (2013.01); G01N 29/043 (2013.01); G01N 29/11 (2013.01); G01N 29/28 (2013.01); G01N 29/4427 (2013.01); G01N 33/207 (2019.01); G01N 2291/267 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A detection system, comprising:
an arm mechanism that is articulated;
an end effector located at a distal part of the arm mechanism; and
a control device controlling the arm mechanism and the rotating stage,
the end effector including
a rotating stage, and
a detector located at the distal part with the rotating stage interposed, the detector transmitting an ultrasonic wave and detecting a reflected wave,
a tip of the detector being positioned at a rotation center of the rotating stage,
the control device performing
a first operation of causing the detector to contact an object by operating the arm mechanism, and
a second operation of changing a tilt of the tip of the detector by operating the rotating stage based on a detection result of the reflected wave from the detector.