US 12,461,070 B2
Inspection apparatus and inspection method
Akihiko Enamito, Kawasaki (JP); Tatsuhiko Goto, Kawasaki (JP); and Osamu Nishimura, Kawasaki (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 25, 2022, as Appl. No. 17/822,253.
Claims priority of application No. 2022-022275 (JP), filed on Feb. 16, 2022.
Prior Publication US 2023/0258606 A1, Aug. 17, 2023
Int. Cl. G01N 29/12 (2006.01); G01N 29/04 (2006.01); G01N 29/44 (2006.01)
CPC G01N 29/12 (2013.01) [G01N 29/045 (2013.01); G01N 29/4463 (2013.01); G01N 2291/023 (2013.01); G01N 2291/0289 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An inspection apparatus comprising:
a vibration sensor configured to detect a vibration of an inspection target object to which the vibration is excited;
a microphone arranged near the inspection target object and configured to collect a radiated sound from the inspection target object; and
a processor including hardware and configured to
calculate an impulse response between the vibration sensor and the microphone based on the vibration detected by the vibration sensor and a sound pressure of the radiated sound collected by the microphone,
denoise an unnecessary component from the impulse response,
convert the impulse response, from which the unnecessary component has been denoised, into a frequency characteristic,
calculate acoustic energy between the vibration sensor and the microphone based on the frequency characteristic, and
determine the presence/absence of an abnormal state of the inspection target object based on the acoustic energy.