US 12,461,059 B2
Gas sensor with a resonant element, method for producing the same and use of the same for detecting gases
Bernhard Rieder, Regensburg (DE); and Rainer Markus Schaller, Saal a.d. Donau (DE)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on May 9, 2022, as Appl. No. 17/662,593.
Claims priority of application No. 102021112811.0 (DE), filed on May 18, 2021.
Prior Publication US 2022/0373507 A1, Nov. 24, 2022
Int. Cl. G01N 27/414 (2006.01); G01N 33/00 (2006.01)
CPC G01N 27/4141 (2013.01) [G01N 33/0036 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A gas sensor, comprising:
a substrate;
a first semiconductor-based sensor element for determining at least one of a density of a gas or a viscosity of the gas, wherein the first semiconductor-based sensor element is arranged above the substrate and includes a resonant element, wherein the first semiconductor-based sensor element comprises a first semiconductor layer that defines a first opening, and wherein the resonant element extends laterally from an edge of the first opening partially over the first opening such that the resonant element hangs over the first opening;
a second semiconductor-based sensor element for determining the density of the gas, wherein the second semiconductor-based sensor element includes an acoustic resonator; and
a cover arranged above the first semiconductor-based sensor element,
wherein the substrate or the cover has a second opening, and
wherein the first opening, the acoustic resonator, and the second opening are coupled together to allow a passage of the gas to the first semiconductor-based sensor element for interacting with the resonant element and to the second semiconductor-based sensor element for interacting with the acoustic resonator.