US 12,461,008 B2
Particle detector for detecting charged particles
Michel Aliman, Oberkochen (DE); and Alexander Laue, Cologne (DE)
Assigned to Leybold GmbH, Cologne (DE)
Appl. No. 17/906,128
Filed by Leybold GmbH, Cologne (GB)
PCT Filed Mar. 8, 2021, PCT No. PCT/EP2021/055787
§ 371(c)(1), (2) Date Sep. 12, 2022,
PCT Pub. No. WO2021/180653, PCT Pub. Date Sep. 16, 2021.
Claims priority of application No. 10 2020 203 234.3 (DE), filed on Mar. 13, 2020.
Prior Publication US 2023/0114569 A1, Apr. 13, 2023
Int. Cl. G01N 15/1031 (2024.01); G01N 15/10 (2024.01); H01J 49/02 (2006.01)
CPC G01N 15/1031 (2013.01) [G01N 2015/1024 (2024.01); H01J 49/025 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A particle detector comprising:
a measuring electrode for measuring charged particles, a detection device for detecting the charged particles measured by the measuring electrode, and an evaluation device for determining the number of charged particles detected by the detection device, characterized in that the detection device has a charge amplifier for converting a charge signal generated on the measuring electrode by the charged particles into a voltage signal and an amplifier device for amplifying the voltage signal to form an amplified voltage signal;
wherein the evaluation device is designed to evaluate the amplified voltage signal in order to determine the number of charged particles detected by determining a voltage difference between a first voltage of the amplified voltage signal before a collision time of the charged particles at the measuring electrode and a second voltage of the amplified voltage signal after the collision time.