US 12,460,981 B2
Micromechanical component for a capacitive pressure sensor device, capacitive pressure sensor device, and a manufacturing method for a capacitive pressure sensor device
Ferenc Lukacs, Budapest (HU); Mate Erdosi, Dunakeszi (HU); Raschid Baraki, Reutlingen (DE); Sophielouise Mach, Reutlingen (DE); Thomas Friedrich, Moessingen-Oeschingen (DE); and Volkmar Senz, Metzingen (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Appl. No. 18/256,952
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Nov. 18, 2021, PCT No. PCT/EP2021/082061
§ 371(c)(1), (2) Date Jun. 12, 2023,
PCT Pub. No. WO2022/128302, PCT Pub. Date Jun. 23, 2022.
Claims priority of application No. 10 2020 215 985.8 (DE), filed on Dec. 16, 2020.
Prior Publication US 2024/0035910 A1, Feb. 1, 2024
Int. Cl. G01L 9/04 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01)
CPC G01L 9/0047 (2013.01) [G01L 9/0073 (2013.01); G01L 19/0618 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A micromechanical component for a capacitive pressure sensor device, comprising:
a substrate;
a frame structure which frames a partial surface of the substrate and/or an interlayer applied to the substrate, wherein at least one electrode is mounted on the framed partial surface and/or the framed interlayer;
a pressure-sensitive membrane on which an external pressure acts, wherein the pressure-sensitive membrane is stretched via the frame structure in such a way that a self-supporting area of the pressure-sensitive membrane spans the framed partial surface and/or the framed interlayer, wherein an action of the external pressure brings about a deformation of the pressure-sensitive membrane on an outer side of the self-supporting area, wherein the outer side is directed away from the partial surface and/or the interlayer, wherein the self-supporting area of the pressure-sensitive membrane has at least one movable counter electrode directed toward the framed partial surface and/or the framed interlayer; and
a sealed cavity having a reference pressure, which is surrounded by the pressure-sensitive membrane and the frame structure;
wherein the self-supporting area of the pressure-sensitive membrane has local reinforcement structures or increasing a membrane thickness of the self-supporting area, wherein the local reinforcement structures are mounted in particular regions of the self-supporting area where a membrane thickness of the self-supporting area changes.