US 12,460,930 B2
MEMS gyroscope having quadrature compensation electrodes and method for compensating a quadrature error
Gabriele Gattere, Castronno (IT); Manuel Riani, Como (IT); and Carlo Valzasina, Gessate (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Oct. 20, 2022, as Appl. No. 18/048,370.
Claims priority of application No. 102021000027764 (IT), filed on Oct. 29, 2021.
Prior Publication US 2023/0135941 A1, May 4, 2023
Int. Cl. G01C 19/5712 (2012.01); B81B 3/00 (2006.01)
CPC G01C 19/5712 (2013.01) [B81B 3/0051 (2013.01); B81B 2201/0242 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A micro electro-mechanical systems (MEMS) gyroscope comprising:
a substrate;
a movable mass suspended over the substrate, and configured to move in a driving direction and in a detection direction transverse to the driving direction, the movable mass having a first face and a second face opposite to the first face, the movable mass including a through opening extending through the movable mass between the first and the second faces of the movable mass;
a detection electrode fixed to the substrate, the detection electrode configured to detect movement of the movable mass in the detection direction, the movable mass directly overlying the detection electrode;
a driving electrode fixed to the substrate, the driving electrode configured to cause the movable mass to move in the driving direction, the driving electrode being spaced from a first sidewall of the movable mass;
a plurality of anchors that are spaced from a second sidewall of the movable mass and are fixed to the substrate;
a first quadrature compensation electrode group including a plurality of electrodes fixed to the substrate, and capacitively coupled to the movable mass, the first quadrature compensation electrode group facing the first face of the movable mass, the plurality of electrodes of the first quadrature compensation electrode group being coupled to plurality of anchors, respectively; and
a second quadrature compensation electrode group including a plurality of electrodes fixed to the substrate, and capacitively coupled to the movable mass, the second quadrature compensation electrode group facing the second face of the movable mass,
each of the plurality of electrodes of the first quadrature compensation electrode group directly overlies a respective electrode of the plurality of electrodes of the second quadrature compensation electrode group and a portion of the through opening in the movable mass,
the first and the second quadrature compensation electrode groups each having a respective variable facing area with the movable mass as a result of movement of the movable mass in the driving direction,
the first and the second quadrature compensation electrode groups being configured to exert an electrostatic force on the movable mass during the movement of the movable mass in the driving direction.