US 12,460,925 B2
Method for the computer assisted determination of physical properties of a porous layer disposed on a surface of substrate
Gabriel Micard, Constance (DE); Yves Patrick Botchak Mouafi, Reichenau (DE); and Barbara Terheiden, Constance (DE)
Assigned to UNIVERSITÄT KONSTANZ, Constance (DE)
Appl. No. 18/263,422
Filed by UNIVERSITÄT KONSTANZ, Constance (DE)
PCT Filed Jan. 29, 2021, PCT No. PCT/EP2021/052129
§ 371(c)(1), (2) Date Jul. 28, 2023,
PCT Pub. No. WO2022/161618, PCT Pub. Date Aug. 4, 2022.
Prior Publication US 2024/0118075 A1, Apr. 11, 2024
Int. Cl. G01B 11/30 (2006.01); G01B 11/06 (2006.01); G01N 15/08 (2006.01); G01N 21/45 (2006.01); G01N 21/55 (2014.01)
CPC G01B 11/30 (2013.01) [G01B 11/0625 (2013.01); G01N 15/08 (2013.01); G01N 21/45 (2013.01); G01N 21/55 (2013.01); G01N 2015/0846 (2013.01); G01N 2015/086 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method for computer-implemented determination of physical properties of
a porous layer present on a surface of a substrate,
wherein the physical properties comprise at least:
a layer thickness of the layer,
a porosity of the layer, and
a roughness of the layer at an interface with the substrate supporting the layer,
the method comprising:
detecting a reflectance curve concerning light irradiated onto the porous layer within a wavelength range in which the porous layer is largely transparent, setting a predetermined roughness start value, setting a porosity start value based on knowledge concerning a manufacturing process for forming the porous layer,
setting a layer thickness start value based on an evaluation of periodic fluctuations of reflectance intensities within the detected reflectance curve, and determining the physical properties of the porous layer by computer-implemented fitting of the detected reflectance curve using a non-linear least squares method based on the roughness start value, the porosity start value and the layer thickness start value.