| CPC F04B 43/08 (2013.01) | 15 Claims |

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1. A torsion pump, comprising:
a tube member having a hose communicating with a chemical liquid inlet and a chemical liquid outlet forming an open path from the chemical liquid inlet to the chemical liquid outlet through the hose, and a cylindrical drum provided to wind the hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum; and
a driver configured to provide a rotational force such that the hose is wound around the drums,
wherein the tube member includes
a first flange configured to support one end of the drum; and
a second flange configured to support another end of the drum,
wherein one end of the hose is connected to the first flange, and another end of the hose is connected to the second flange,
wherein the second flange is connected to the driver and rotated,
wherein the driver further includes a compensation member configured to compensate for a vertical length deformation caused by a twisting operation of the tube member,
wherein the compensation member includes a bell screw, and
wherein the second flange can rotate and move up and down on the ball screw.
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