US 12,460,298 B2
Showerhead design to control stray deposition
Akshay Dhanakshirur, Hubli (IN); Juan Carlos Rocha-Alvarez, San Carlos, CA (US); Kaushik Comandoor Alayavalli, Sunnyvale, CA (US); Jay D. Pinson, II, San Jose, CA (US); Rick Kustra, San Jose, CA (US); Badri N. Ramamurthi, Los Gatos, CA (US); Anup Kumar Singh, Santa Clara, CA (US); Ganesh Balasubramanian, Fremont, CA (US); Bhaskar Kumar, San Jose, CA (US); Vinayak Vishwanath Hassan, San Francisco, CA (US); Canfeng Lai, Fremont, CA (US); Kallol Bera, Fremont, CA (US); and Sathya Swaroop Ganta, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 16, 2021, as Appl. No. 17/403,056.
Claims priority of application No. 202041037913 (IN), filed on Sep. 2, 2020.
Prior Publication US 2022/0064797 A1, Mar. 3, 2022
Int. Cl. C23C 16/455 (2006.01); C23C 16/505 (2006.01); H01J 37/32 (2006.01)
CPC C23C 16/45565 (2013.01) [H01J 37/3244 (2013.01); H01J 37/32522 (2013.01); C23C 16/505 (2013.01); H01J 2237/3321 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A lid for a process chamber, the lid comprising:
a plate having a first surface and a second surface opposite the first surface, the plate including an axis generally perpendicular to the first surface;
a recess in the first surface, the recess including a sidewall extending at a first acute angle to the axis from an opening at the first surface to a floor within the plate;
a seal groove formed in the first surface and surrounding the opening; and
an array of holes, each hole extending at a second acute angle to the axis from an entrance at the floor of the recess to an exit at a protrusion of the second surface, the protrusion aligned with the recess.