US 12,460,296 B2
Gas diffuser housings, devices, and related methods
Michael Addorisio, Peabody, MA (US); David McCrimmon, Andover, MA (US); Virendra Warke, North Chelmsford, MA (US); Devon Nichole Dion, Nashua, NH (US); and Benjamin Schooler, Belmont, MA (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Nov. 9, 2022, as Appl. No. 17/983,907.
Claims priority of provisional application 63/280,283, filed on Nov. 17, 2021.
Prior Publication US 2023/0151490 A1, May 18, 2023
Int. Cl. C23C 16/40 (2006.01); B29C 64/153 (2017.01); B29C 64/268 (2017.01); C23C 16/455 (2006.01); B33Y 10/00 (2015.01); B33Y 30/00 (2015.01); B33Y 80/00 (2015.01)
CPC C23C 16/45559 (2013.01) [B29C 64/153 (2017.08); B29C 64/268 (2017.08); C23C 16/45563 (2013.01); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 80/00 (2014.12)] 25 Claims
OG exemplary drawing
 
1. A directional gas diffuser comprising:
an elongate housing, the housing comprising:
an inlet end,
a closed end,
a length between the inlet end and the closed end,
an opening extending along the length on a front side of the housing, and
a channel extending between the inlet end and the closed end, the channel defined along the length by:
the opening extending along the front side,
an elongate back surface, and
elongate side surfaces, wherein
the channel has a length, a width, a depth, and a varied cross-sectional area along the channel length.