US 12,460,293 B2
Gas recovery systems and methods
Jeffrey J. Spiegelman, San Diego, CA (US)
Assigned to RASIRC, Inc., San Diego, CA (US)
Filed by RASIRC, Inc., San Diego, CA (US)
Filed on Jun. 13, 2023, as Appl. No. 18/333,714.
Claims priority of provisional application 63/366,684, filed on Jun. 20, 2022.
Prior Publication US 2023/0407470 A1, Dec. 21, 2023
Int. Cl. B01D 53/047 (2006.01); B01D 53/14 (2006.01); C23C 16/44 (2006.01); F02C 1/00 (2006.01); F02C 9/16 (2006.01); G03F 7/00 (2006.01)
CPC C23C 16/4412 (2013.01) [B01D 53/047 (2013.01); B01D 53/14 (2013.01); F02C 1/00 (2013.01); F02C 9/16 (2013.01); G03F 7/70891 (2013.01); B01D 2258/0216 (2013.01); F05D 2270/03 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A gas recovery system, comprising:
a gas inlet, wherein a gas input into the gas inlet comprises a gas output from a processing tool, and wherein the gas output from the processing tool comprises hydrogen or ammonia gas;
a compressor and a buffer tank, wherein either (a) the compressor is coupled to the gas inlet and the compressor is between the gas inlet and the buffer tank, or (b) the buffer tank is coupled to the gas inlet and the buffer tank is between the gas inlet and the compressor;
a first variable speed microturbine coupled to the buffer tank for case (a) or the compressor for case (b);
a sensor, between the gas inlet and the first variable speed microturbine, the sensor comprising a gas analyzer, a flow meter, or a pressure sensor; and
a control system coupled to the sensor and the first variable speed microturbine, wherein the control system is configured to control a first speed of the first variable speed microturbine in response to a measurement from the sensor.
 
12. A method, comprising:
supplying a gas into a gas inlet, wherein the gas comprises a gas output from a processing tool, and wherein the gas output from the processing tool comprises hydrogen or ammonia gas;
changing a pressure of the gas using a compressor;
storing the gas in a buffer tank, wherein either (a) the compressor is coupled to the gas inlet and the compressor is between the gas inlet and the buffer tank, or (b) the buffer tank is coupled to the gas inlet and the buffer tank is between the gas inlet and the compressor;
producing electrical power using a first variable speed microturbine coupled to the compressor or the buffer tank;
measuring a property of the gas using a sensor comprising a gas analyzer, a flow meter, or a pressure sensor; and
controlling, using a control system coupled to the sensor and the first variable speed microturbine, a first speed of the first variable speed microturbine in response to the measurement of the property of the gas from the sensor.