US 12,460,290 B2
Method of ultrafast-pulsed laser deposition coupled with plasma lattice and device thereof
Heping Zeng, Chongqing (CN); Mengyun Hu, Chongqing (CN); and Yu Qiao, Chongqing (CN)
Assigned to CHONGQING HUAPU INFORMATION TECHNOLOGY CO., LTD., Chongqing (CN); CHONGQING HUAPU INTELLIGENT EQUIPMENT CO., LTD., Chongqing (CN); CHONGQING HUAPU QUANTUM TECHNOLOGY CO., LTD., Chongqing (CN); CHONGQING HUAPU SCIENTIFIC INSTRUMENT CO., LTD., Chongqing (CN); YUNNAN HUAPU QUANTUM MATERIAL CO., LTD, Kunming (CN); ROI OPTOELECTRONICS TECHNOLOGY CO, LTD., Shanghai (CN); GUANGDONG ROI OPTOELECTRONICS TECHNOLOGY CO., LTD., Guangdong (CN); CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY, Chongqing (CN); and EAST CHINA NORMAL UNIVERSITY, Shanghai (CN)
Filed by Chongqing Huapu Information Technology Co., Ltd., Chongqing (CN); Chongqing Huapu Intelligent Equipment Co., Ltd., Chongqing (CN); Chongqing Huapu Quantum Technology Co., Ltd., Chongqing (CN); Chongqing Huapu Scientific Instrument Co., Ltd., Chongqing (CN); Yunnan Huapu quantum Material Co., Ltd, Yunnan (CN); ROI Optoelectronics Technology CO, LTD., Shanghai (CN); GuangDong ROI Optoelectronics Technology Co., Ltd., Guangdong (CN); Chongqing Institute of East China Normal University, Chongqing (CN); and East China Normal University, Shanghai (CN)
Filed on Nov. 21, 2023, as Appl. No. 18/516,189.
Claims priority of application No. 202211505267.7 (CN), filed on Nov. 28, 2022.
Prior Publication US 2024/0183023 A1, Jun. 6, 2024
Int. Cl. C23C 14/28 (2006.01); C03C 17/22 (2006.01); C23C 14/06 (2006.01)
CPC C23C 14/28 (2013.01) [C03C 17/22 (2013.01); C23C 14/0635 (2013.01); C23C 14/0652 (2013.01); C03C 2217/281 (2013.01); C03C 2217/282 (2013.01); C03C 2218/151 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A method of an ultrafast-pulsed laser deposition, comprising:
step 1: after splitting a femtosecond-pulsed laser beam, focalizing split femtosecond-pulsed laser beams to form a plasma channel based on a nonlinear effect and to generate a femtosecond laser filament; synchronizing the femtosecond-pulsed laser beam by delay synchronization processing so as to form a plasma grating or a plasma lattice by the femtosecond laser filament coupled with each other non-collinearly and crossly; and exciting a target material with the plasma grating or the plasma lattice;
step 2: emitting multiple ultrafast-pulsed laser beams as post pulses; coupling the post pulses with the plasma grating or the plasma lattice sequentially, by controlling a first delay between the post pulses and the plasma grating or the plasma lattice and a second delay between the post pulses thereof, so as to form a regenerated plasma grating or a regenerated plasma lattice with multi-stage cascade in a time domain; and exciting the target material for multiple times; and
step 3: exciting and ablating the target material by adjusting the ultrafast-pulsed laser beams coupled with the regenerated plasma grating or the regenerated plasma lattice, to form a thin film with a required thickness by a deposition of ablated particles on a substrate, by controlling the time.