Method of preparing iodosilanes and compositions therefrom
Scott A Laneman, Vernon Hills, IL (US); Thomas M. Cameron, Newtown, CT (US); Thomas H. Baum, New Fairfield, CT (US); David Kuiper, Brookfield, CT (US); David M. Ermert, Danbury, CT (US); and Johathan W. Dube, Bomanville (CA)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Jun. 24, 2024, as Appl. No. 18/752,725.
Application 18/752,725 is a division of application No. 17/239,135, filed on Apr. 23, 2021, abandoned.
Claims priority of provisional application 63/014,840, filed on Apr. 24, 2020.
Prior Publication US 2024/0343591 A1, Oct. 17, 2024
Int. Cl. C01B 33/107 (2006.01)
CPC C01B 33/107 (2013.01)
17 Claims
1. A composition comprising: SiH2I2; SiH2Cl2; SiH2(Cl)(I); and an aluminum containing catalyst.