US 12,459,809 B2
Method and apparatus for evaluating electrostatic or nonlinear devices
Sandra Manosalvas-Kjono, Stanford, CA (US); Ronald Quan, Cupertino, CA (US); Olav Solgaard, Stanford, CA (US); and Zhanghao Sun, Mountain View, CA (US)
Assigned to The Board of Trustees of the Leland Stanford Junior University, Stanford, CA (US)
Filed by The Board of Trustees of the Leland Stanford Junior University, Stanford, CA (US)
Filed on Dec. 2, 2021, as Appl. No. 17/540,719.
Application 17/540,719 is a continuation of application No. 16/270,374, filed on Feb. 7, 2019, granted, now 11,192,779.
Claims priority of provisional application 62/745,118, filed on Oct. 12, 2018.
Claims priority of provisional application 62/627,613, filed on Feb. 7, 2018.
Prior Publication US 2022/0089432 A1, Mar. 24, 2022
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01); B81C 99/00 (2010.01)
CPC B81B 7/008 (2013.01) [B81B 3/0021 (2013.01); B81B 7/02 (2013.01); B81C 99/003 (2013.01); B81B 2201/038 (2013.01); B81B 2201/042 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method for use with a MEMS apparatus, the method comprising:
actuating the MEMS apparatus via an input signal, wherein the MEMS apparatus has an arrangement of at least one micro-mirror that is integrated with a capacitive portion and that provides a field of view;
using modulation circuitry to modulate the input signal via signal modulation selected as including one or a combination from among the following: drive amplitude modulation, phase modulation, and frequency modulation; and
using the modulated input signal to drive the MEMS apparatus and to cause a change or increase in the field of view provided by the arrangement of at least one micro-mirror.