US 12,459,808 B2
Sensor
Ping Wang, Fujisawa Kanagawa (JP); and Hiroaki Yamazaki, Yokohama Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Kawasaki (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 31, 2022, as Appl. No. 17/823,629.
Claims priority of application No. 2021-148354 (JP), filed on Sep. 13, 2021; and application No. 2022-095735 (JP), filed on Jun. 14, 2022.
Prior Publication US 2023/0077493 A1, Mar. 16, 2023
Int. Cl. B81B 3/00 (2006.01)
CPC B81B 3/0078 (2013.01) [B81B 2201/0264 (2013.01); B81B 2207/095 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a base including a first base region and a second base region;
a first detection unit including a first detection element, the first detection element including a first resistance member, a first conductive member, and a first insulating member, at least a part of the first insulating member being between the first resistance member and the first conductive member, a first gap being provided between the first base region and the first detection element, the first detection element having a first area in a plane crossing a first direction from the first base region to the first detection element; and
a second detection unit including a second detection element, the second detection element including a second resistance member, a second conductive member, and a second insulating member, at least a part of the second insulating member being between the second resistance member and the second conductive member, a second gap being provided between the second base region and the second detection element, the second detection element having a second area in the plane, the second area being smaller than the first area.