US 12,459,080 B2
Cleaning system for polishing liquid delivery arm
Roy C. Nangoy, Santa Clara, CA (US); Shantanu Rajiv Gadgil, Santa Clara, CA (US); Nathan Arron Davis, Gilbert, AZ (US); Allen L. D'Ambra, Burlingame, CA (US); Michael J. Coughlin, Livermore, CA (US); and Sumit Subhash Patankar, Fremont, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 6, 2024, as Appl. No. 18/597,077.
Application 18/597,077 is a continuation of application No. 17/344,617, filed on Jun. 10, 2021, granted, now 12,240,078.
Claims priority of provisional application 63/043,665, filed on Jun. 24, 2020.
Prior Publication US 2024/0208006 A1, Jun. 27, 2024
Int. Cl. B24B 57/02 (2006.01); B24B 37/34 (2012.01); B24B 53/017 (2012.01)
CPC B24B 57/02 (2013.01) [B24B 37/34 (2013.01); B24B 53/017 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A polishing liquid delivery arm cleaning kit, comprising:
an upper cover configured to be removably fit over a polishing liquid delivery arm;
a lower cover configured to be removably fit below the polishing liquid delivery arm and detachably securable to the upper cover to form a shell surrounding the polishing liquid delivery arm; and
an insert removably supported by the lower cover, the insert having an arm-facing surface shaped to direct cleaning fluid projected downwardly from the polishing liquid delivery arm back toward the polishing liquid delivery arm.