US 12,459,056 B2
Processing system
Shinji Sato, Fukaya (JP)
Assigned to NIKON CORPORATION, Tokyo (JP)
Appl. No. 18/017,936
Filed by NIKON CORPORATION, Tokyo (JP)
PCT Filed Jul. 29, 2020, PCT No. PCT/JP2020/029000
§ 371(c)(1), (2) Date Jan. 25, 2023,
PCT Pub. No. WO2022/024246, PCT Pub. Date Feb. 3, 2022.
Prior Publication US 2023/0256537 A1, Aug. 17, 2023
Int. Cl. B23K 26/08 (2014.01); B23K 26/03 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01)
CPC B23K 26/0884 (2013.01) [B23K 26/03 (2013.01); B23K 26/032 (2013.01); B25J 9/1679 (2013.01); B25J 9/1697 (2013.01); B25J 13/088 (2013.01)] 60 Claims
OG exemplary drawing
 
1. A processing system that processes an object by irradiating the object with a processing light through an irradiation optical system,
the processing system comprising:
an irradiation apparatus that includes at least a terminal optical element of the irradiation optical system;
a movement apparatus that moves the irradiation apparatus;
a first measurement apparatus that is disposed at the irradiation apparatus and that measures a position of the object;
a second measurement apparatus that measures a position of the object through the irradiation optical system; and
a third measurement apparatus that measures a position of the irradiation apparatus.