US 12,459,007 B2
Separating apparatus and separating method
Yohei Yamawaki, Kumamoto (JP); Seiji Nakano, Kumamoto (JP); and Yoshihiro Kawaguchi, Kumamoto (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Appl. No. 17/625,366
Filed by Tokyo Electron Limited, Tokyo (JP)
PCT Filed Jun. 29, 2020, PCT No. PCT/JP2020/025505
§ 371(c)(1), (2) Date Jan. 7, 2022,
PCT Pub. No. WO2021/006091, PCT Pub. Date Jan. 14, 2021.
Claims priority of application No. 2019-128160 (JP), filed on Jul. 10, 2019.
Prior Publication US 2022/0266312 A1, Aug. 25, 2022
Int. Cl. B08B 3/02 (2006.01); B08B 1/12 (2024.01); B08B 5/04 (2006.01); B08B 13/00 (2006.01); B08B 15/00 (2006.01)
CPC B08B 3/02 (2013.01) [B08B 1/12 (2024.01); B08B 5/04 (2013.01); B08B 13/00 (2013.01); B08B 15/00 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A separating apparatus configured to separate a processing target object into a first separation body and a second separation body, the separating apparatus comprising:
a first holder configured to hold the first separation body;
a second holder configured to hold the second separation body;
a moving unit configured to move the first holder and the second holder relatively to each other; and
a suction nozzle configured to suction a space between the first holder and the second holder, and configured to move within the space between the first holder and the second holder.