US 12,458,969 B2
Acoustic resonator device
Rio Rivas, Bend, OR (US); Kevin McCarron, Bend, OR (US); Matthew Wasilik, Plano, TX (US); and David Doerr, Plano, TX (US)
Assigned to Qorvo US, Inc., Greensoboro (NC)
Filed by Qorvo US, Inc., Greensboro, NC (US)
Filed on Mar. 21, 2024, as Appl. No. 18/612,611.
Application 18/612,611 is a division of application No. 17/749,002, filed on May 19, 2022, granted, now 11,992,839.
Application 17/749,002 is a continuation of application No. 16/868,092, filed on May 6, 2020, granted, now 11,369,960, issued on Jun. 28, 2022.
Claims priority of provisional application 62/844,000, filed on May 6, 2019.
Prior Publication US 2024/0226889 A1, Jul. 11, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. B01L 3/00 (2006.01); G01N 29/02 (2006.01); G01N 29/24 (2006.01)
CPC B01L 3/50273 (2013.01) [G01N 29/022 (2013.01); G01N 29/2462 (2013.01); B01L 2400/0436 (2013.01); G01N 2291/0426 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A bulk acoustic wave resonator structure comprising:
a bulk acoustic wave resonator, wherein the bulk acoustic wave resonator comprises a first electrode disposed over a portion of a first surface of a substrate, a piezoelectric material disposed over the first electrode, and a second electrode disposed over the piezoelectric material, wherein an overlapping region of the first electrode, the piezoelectric material, and the second electrode forms the bulk acoustic wave resonator;
an acoustic energy management structure disposed over a first side of the bulk acoustic wave resonator; and
an interconnect disposed over a portion of the second electrode extending beyond the bulk acoustic wave resonator, wherein the interconnect extends above a height of the acoustic energy management structure in a direction substantially perpendicular to the first surface of the substrate.