US 12,133,362 B2
Cooling element architecture for MEMS-based cooling system architecture
Vikram Mukundan, San Ramon, CA (US); Ananth Saran Yalamarthy, Stanford, CA (US); Suryaprakash Ganti, Los Altos, CA (US); Seshagiri Rao Madhavapeddy, La Jolla, CA (US); and Prabhu Sathyamurthy, San Jose, CA (US)
Assigned to Frore Systems Inc., San Jose, CA (US)
Filed by Frore Systems Inc., San Jose, CA (US)
Filed on Jul. 11, 2022, as Appl. No. 17/862,171.
Claims priority of provisional application 63/220,862, filed on Jul. 12, 2021.
Prior Publication US 2023/0011084 A1, Jan. 12, 2023
Int. Cl. H05K 7/20 (2006.01); G06F 1/20 (2006.01)
CPC H05K 7/20272 (2013.01) [G06F 1/20 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A cooling system, comprising:
a support structure; and
a cooling element having a thickness and including an anchored region and a cantilevered arm, the anchored region being coupled to and supported by the support structure, the cantilevered arm extending outward from the anchored region wherein the cantilevered arm includes at least one cavity therein, the at least one cavity having a depth of at least one-third and not more than three-fourths of the thickness of the cooling element;
wherein the cooling element is configured to undergo vibrational motion when actuated to drive a fluid for cooling a heat-generating structure.