US 12,133,318 B2
Rotating target for extreme ultraviolet source with liquid metal
Alexander Bykanov, Escondido, CA (US); and Rui-Fang Shi, Cupertino, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Dec. 30, 2022, as Appl. No. 18/091,994.
Claims priority of provisional application 63/350,868, filed on Jun. 10, 2022.
Prior Publication US 2023/0403778 A1, Dec. 14, 2023
Int. Cl. H05G 2/00 (2006.01)
CPC H05G 2/005 (2013.01) [H05G 2/008 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A system comprising:
a vacuum chamber; and
a rotating target assembly having an annular groove with a distal wall relative to an axis of rotation, wherein the rotating target is disposed in the vacuum chamber, and wherein the distal wall includes a porous region.