CPC H04R 19/04 (2013.01) [B81B 7/0064 (2013.01); B81C 1/00333 (2013.01); H04R 1/04 (2013.01); H04R 3/00 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/0271 (2013.01); B81B 2201/0292 (2013.01); B81B 2203/0127 (2013.01); B81B 2207/015 (2013.01); B81C 2203/0109 (2013.01); H04R 2201/003 (2013.01)] | 19 Claims |
1. A microelectromechanical system (MEMS) sensor package, comprising:
a substrate;
a MEMS diaphragm disposed over the substrate; and
a lid, wherein the lid and the substrate define a cavity at least partially surrounding the MEMS diaphragm, wherein the lid comprises:
a light mitigation structure; and
a port hole located in the lid and providing a through hole to allow a signal to be received by the MEMS diaphragm, wherein the MEMS diaphragm defines a first surface area, and wherein a second surface area of a portion of the light mitigation structure that is parallel to and facing the MEMS diaphragm is greater than the first surface area such that the second surface area surrounds a projection of the first surface area.
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